压强传感器 [
yā qiáng chuán gǎn qì]
pressure transducer
- 利用自行研制的传感器〔1〕,通过对射频放电电压电流以及其相位角的精确测定,结合放电管的效电路,对内置电极射频气体放电激励激光器阻抗特性进行研究,得出内置电极射频气体放电激励激光器离子体的伏安特性曲线,以及离子体电阻和气体压强、气体放电电流之间的关系。
It is presented in this paper that the method known fro m network analysis with home made probe to measure current,voltage and phase ang le more accurately at RF discharge.It has been done that information about the e lectrical characteristics of the plasma using an equivalent circuit model and ta king account stray capacitances of the set-up.
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