barrier layer [计] 阻挡层, 势垒层
- Forming tantalum based films( tantalum, tantalum nitride, tantalum silicide, tantalum carbide) on Si substrate via both tantalum sputtering and chemical vapor deposition( CVD) as barrier layer in l
介绍了在硅基片上用钽溅射靶溅射沉积和用钽的化合物气相化学沉积钽基膜(属钽、化钽、化钽、化钽、化硅化钽、化碳化钽)为集成电路中防止铜向基片硅中扩散的阻挡层,介绍了钽溅射靶的技术要求,加工方法以及化学气相沉积钽基薄膜的方法。 - The barrier-layer alumina films and porous-layer alumina make up of nanometer alumina membrane.
其中阻挡层氧化铝和多孔层氧化铝构成纳米氧化铝模板。 - Through TEM observation of the film, the results show that the aluminum anodized under appropriate coditions have been evidently divided into three layer in which barrier-laye
结果表明,经阳极氧化处理后的铝片明显分成了未反应的铝、挡层氧化铝和多孔氧化铝3层结构,且阻挡层位于未反应铝和多孔层之间。
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