自动节流阀 [
zì dòng jié liú fá]
automatic throttle valve
- 第三种真空控制模式,采用步进电机自动控制节流阀,实现了对进气质量流量和真空度的双设定,从而达到了镀膜过程真空状态的最高控制精度.
The third vacuum control mode with the stepping motor driven throttle valve is to reach the most accurate vacuum control when gas mass flow rates and vacuum condition are set during coating process.
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