射频溅射 [电子] radio frequency sputtering
[电子] radio-frequency sputtering
- 采用射频溅射制备BST薄膜,研究了薄膜的介电击穿特性。
Dielectric breakdown of BST thin films prepared by RF sputtering is studied in this paper. - 在不同条件下用射频溅射方法制备了氮化碳薄膜。
Carbon nitride thin films are deposited under different conditions of radio frequency sputtering. - 在不同的衬底温度下用射频溅射方法制备了氮化碳薄膜。
Carbon nitride thin films have been deposited by radio frequency sputtering at different substrate temperature.